The multipole resonance probe: Characterization of a prototype

Martin Lapke; Jens Oberrath; Christian Schulz; Robert Storch; Tim Styrnoll; Christian Zietz; Peter Awakowicz; Ralf Peter Brinkmann; Thomas Musch; Thomas Mussenbrock; Ilona Rolfes

doi:10.1088/0963-0252/20/4/042001

The multipole resonance probe: Characterization of a prototype

Research output: Journal contributions › Comments / Debate / Reports › Research

Standard

The multipole resonance probe: Characterization of a prototype. / Lapke, Martin; Oberrath, Jens; Schulz, Christian et al.
In: Plasma Sources Science and Technology, Vol. 20, No. 4, 042001, 08.2011.

Research output: Journal contributions › Comments / Debate / Reports › Research

Harvard

Lapke, M, Oberrath, J, Schulz, C, Storch, R, Styrnoll, T, Zietz, C, Awakowicz, P, Brinkmann, RP, Musch, T, Mussenbrock, T & Rolfes, I 2011, 'The multipole resonance probe: Characterization of a prototype', Plasma Sources Science and Technology, vol. 20, no. 4, 042001. https://doi.org/10.1088/0963-0252/20/4/042001

APA

Lapke, M., Oberrath, J., Schulz, C., Storch, R., Styrnoll, T., Zietz, C., Awakowicz, P., Brinkmann, R. P., Musch, T., Mussenbrock, T., & Rolfes, I. (2011). The multipole resonance probe: Characterization of a prototype. Plasma Sources Science and Technology, 20(4), Article 042001. https://doi.org/10.1088/0963-0252/20/4/042001

Vancouver

Lapke M, Oberrath J, Schulz C, Storch R, Styrnoll T, Zietz C et al. The multipole resonance probe: Characterization of a prototype. Plasma Sources Science and Technology. 2011 Aug;20(4):042001. doi: 10.1088/0963-0252/20/4/042001

Bibtex

@article{aa146315f50d452b82160befaceff4c3,

title = "The multipole resonance probe: Characterization of a prototype",

abstract = "The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements. {\textcopyright} 2011 IOP Publishing Ltd.",

keywords = "Engineering",

author = "Martin Lapke and Jens Oberrath and Christian Schulz and Robert Storch and Tim Styrnoll and Christian Zietz and Peter Awakowicz and Brinkmann, {Ralf Peter} and Thomas Musch and Thomas Mussenbrock and Ilona Rolfes",

year = "2011",

month = aug,

doi = "10.1088/0963-0252/20/4/042001",

language = "English",

volume = "20",

journal = "Plasma Sources Science and Technology",

issn = "0963-0252",

publisher = "IOP Publishing Ltd",

number = "4",

}

RIS

TY - JOUR

T1 - The multipole resonance probe

T2 - Characterization of a prototype

AU - Lapke, Martin

AU - Oberrath, Jens

AU - Schulz, Christian

AU - Storch, Robert

AU - Styrnoll, Tim

AU - Zietz, Christian

AU - Awakowicz, Peter

AU - Brinkmann, Ralf Peter

AU - Musch, Thomas

AU - Mussenbrock, Thomas

AU - Rolfes, Ilona

PY - 2011/8

Y1 - 2011/8

N2 - The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements. © 2011 IOP Publishing Ltd.

AB - The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements. © 2011 IOP Publishing Ltd.

KW - Engineering

UR - http://www.scopus.com/inward/record.url?scp=80051637894&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/f90f82be-6a12-30b5-923c-b1df75ad11b0/

U2 - 10.1088/0963-0252/20/4/042001

DO - 10.1088/0963-0252/20/4/042001

M3 - Comments / Debate / Reports

AN - SCOPUS:80051637894

VL - 20

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

SN - 0963-0252

IS - 4

M1 - 042001

ER -