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Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Authors

The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.

Original languageEnglish
Title of host publication2019 Kleinheubach Conference, KHB 2019
Place of PublicationPiscataway
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Publication date01.09.2019
Article number8890211
ISBN (print)978-1-7281-3161-0
ISBN (electronic)978-3-948571-00-9
Publication statusPublished - 01.09.2019
EventKleinheubach Conference - KHB 2019 - Miltenberg, Germany
Duration: 23.09.2019 → 25.09.2019
https://www.kh2019.de/

    Research areas

  • Active plasma resonance spectroscopy, Multipole resonance probe, Planar multipole resonance probe, Plasma diagnostics
  • Engineering

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Numerical study of electrode vaporization rates in an Automotive HVDC Relay in hydrogen and open air in a short circuit situation

Ewuntomah, C. M. & Oberrath, J., 2021, Proceedings of the 66th IEEE Holm Conference on Electrical Contacts, HLM 2021. Institute of Electrical and Electronics Engineers Inc., p. 24-31 8 p. (Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts; vol. 2021-October).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

2D Simulations of the NS-Laser Shock Peening

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Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Pohle, D., Schulz, C., Oberberg, M., Friedrichs, M., Serwa, A., Uhlig, P., Oberrath, J., Awakowicz, P. & Rolfes, I., 02.07.2018, 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., p. 1315-1317 3 p. 8617552. (Asia-Pacific Microwave Conference Proceedings, APMC; vol. 2018-November).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Global modelling of the ns-laser shock peening

Pozdnyakov, V., Keller, S., Klusemann, B., Kashaev, N. & Oberrath, J., 03.2019, DPG-Frühjahrstagung der Sektion Materie und Kosmos (SMuK) : mit den Fachverbänden (sektionszugehörig): Extraterrestrische Physik, Gravitation und Relativitätstheorie, Physik der Hadronenund Kerne, Theoretische und Mathematische Grundlagen der Physik sowie weiteren Fachverbänden: Geschichte der Physik, Kurzzeit- und angewandte Laserphysik, Plasmaphysik, Umweltphysik und den Arbeitskreisen bzw. der Arbeitsgruppe: Beschleunigerphysik, Chancengleichheit, Junge DPG, Philosophie der Physik. Bad Honnef: Deutsche Physikalische Gesellschaft, p. 151 1 p. K 6.1. (Verhandlung der Deutschen Physikalischen Gesellschaft, Reihe 6; vol. 54, no. 2).

Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review

Plasma arcing during contact separation of HVDC relays

Ewuntomah, C. M. & Oberrath, J., 2019, DPG-Frühjahrstagung der Sektion Materie und Kosmos (SMuK): mit den Fachverbänden (sektionszugehörig) Extraterrestrische Physik, Gravitation und Relativitätstheorie, Physik der Hadronen und Kerne, Theoretische und Mathematische Grundlagen der Physik sowie weiteren Fachverbänden Geschichte der Physik, Kurzzeit- und angewandte Laserphysik, Plasmaphysik, Umweltphysik und den Arbeitskreisen bzw. der Arbeitsgruppe Beschleunigerphysik, Chancengleichheit, Junge DPG, Philosophie der Physik : 17.-22. März 2019, Technische Universität München. Nunner, B. (ed.). Bad Honnef: Deutsche Physikalische Gesellschaft e.V., p. 181 1 p. (Verhandlung der Deutschen Physikalischen Gesellschaft, Reihe 6; vol. 54, 2).

Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review

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