Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation

Research output: Contributions to collected editions/worksArticle in conference proceedingsResearchpeer-review


The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.

Original languageEnglish
Title of host publication2019 Kleinheubach Conference, KHB 2019
Place of PublicationPiscataway
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Publication date01.09.2019
Article number8890211
ISBN (Print)978-1-7281-3161-0
ISBN (Electronic)978-3-948571-00-9
Publication statusPublished - 01.09.2019
EventKleinheubach Conference - KHB 2019 - Miltenberg, Germany
Duration: 23.09.201925.09.2019

    Research areas

  • Active plasma resonance spectroscopy, Multipole resonance probe, Planar multipole resonance probe, Plasma diagnostics
  • Engineering