Active plasma resonance spectroscopy: A functional analytic description
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Authors
The term 'active plasma resonance spectroscopy' denotes a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: a signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtain information on the electron density and other plasma parameters. In recent years, the concept has found renewed interest as a basis of industry compatible plasma diagnostics. This paper analyzes the diagnostic technique in terms of a general description based on functional analytic (or Hilbert Space) methods which hold for arbitrary probe geometries. It is shown that the response function of the plasma-probe system can be expressed as a matrix element of the resolvent of an appropriately defined dynamical operator. A specialization of the formalism to a symmetric probe design is given, as well as an interpretation in terms of a lumped circuit model consisting of series resonance circuits. We present ideas for an optimized probe design based on geometric and electrical symmetry. © 2013 IOP Publishing Ltd.
Original language | English |
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Article number | 025005 |
Journal | Plasma Sources Science and Technology |
Volume | 22 |
Issue number | 2 |
Number of pages | 9 |
ISSN | 0963-0252 |
DOIs | |
Publication status | Published - 04.2013 |
Externally published | Yes |
- Engineering