A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring
Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review
Authors
A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).
| Original language | English |
|---|---|
| Title of host publication | 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings |
| Number of pages | 3 |
| Place of Publication | Piscataway |
| Publisher | IEEE - Institute of Electrical and Electronics Engineers Inc. |
| Publication date | 16.01.2019 |
| Pages | 1315-1317 |
| Article number | 8617552 |
| ISBN (print) | 978-1-5386-2184-4 |
| ISBN (electronic) | 978-4-9023-3945-1 |
| DOIs | |
| Publication status | Published - 16.01.2019 |
| Event | 30th Asia-Pacific Microwave Conference 2018: Harmonious World Connected by Microwaves - Kyoto International Conference Center, Kyoto, Japan Duration: 06.11.2018 → 09.11.2018 Conference number: 30 http://www.apmc2018.org/ |
- Engineering
- Multipole resonance probe, Plasma diagnostics