The multipole resonance probe: Evolution of a plasma sensor

Research output: Contributions to collected editions/worksArticle in conference proceedingsResearchpeer-review

Authors

  • Christian Schulz
  • Ilona Rolfes
  • Tim Styrnoll
  • Peter Awakowicz
  • Jens Oberrath
  • Thomas Mussenbrock
  • Ralf Peter Brinkmann
  • Robert Storch
  • Thomas Musch
A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. © 2013 IEEE.
Original languageEnglish
Title of host publicationIEEE Sensors 2013 : Proceedings
Number of pages4
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Publication date2013
Pages1-4
ISBN (print)978-1-4673-4641-2
ISBN (electronic)978-1-4673-4642-9, 978-1-4673-4640-5
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventIEEE Sensors Conference - 2013 - Baltimore, United States
Duration: 03.11.201306.11.2013
Conference number: 12
http://ieee-sensors2013.org/