The multipole resonance probe: Evolution of a plasma sensor

Publikation: Beiträge in SammelwerkenAufsätze in KonferenzbändenForschungbegutachtet

Authors

  • Christian Schulz
  • Ilona Rolfes
  • Tim Styrnoll
  • Peter Awakowicz
  • Jens Oberrath
  • Thomas Mussenbrock
  • Ralf Peter Brinkmann
  • Robert Storch
  • Thomas Musch
A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. © 2013 IEEE.
OriginalspracheEnglisch
TitelIEEE Sensors 2013 : Proceedings
Anzahl der Seiten4
VerlagIEEE - Institute of Electrical and Electronics Engineers Inc.
Erscheinungsdatum2013
Seiten1-4
ISBN (Print)978-1-4673-4641-2
ISBN (elektronisch)978-1-4673-4642-9, 978-1-4673-4640-5
DOIs
PublikationsstatusErschienen - 2013
Extern publiziertJa
VeranstaltungIEEE Sensors Conference - 2013 - Baltimore, USA / Vereinigte Staaten
Dauer: 03.11.201306.11.2013
Konferenznummer: 12
http://ieee-sensors2013.org/

DOI

Zuletzt angesehen

Publikationen

  1. One-third Codetermination at Company Supervisory Boards and Firm Performance in German Manufacturing Industries
  2. Gemeinsam glücklicher
  3. 2. Methoden-Muster: Gestaltung von Beziehungen, Kontaktpflege, Klima
  4. Schreibfähigkeit
  5. Fallstudie
  6. Workshop on impacts of the EU-UK Trade and Cooperation Agreement on fisheries and aquaculture in the EU
  7. The opportunity development process of nascent entrepreneurs
  8. The relationship between working alliance and client outcomes in coaching
  9. Hydration and Dehydration of CaO/ Ca(OH)2 and CaCl2 / CaCl2 * 6 H2O– TGA/ DSC studies
  10. Autonomie der Migration
  11. On the application of laser shock peening for retardation of surface fatigue cracks in laser beam-welded AA6056
  12. Innovation in a Computable General Equilibrium Model
  13. Zwischen Existenzkampf und Professionalisierung
  14. Wieso gilt Ada Lovelace als die ‚erste Programmiererin‘ und was bedeutet überhaupt ‚programmieren‘?
  15. Distribution and community structure of araneocoenoses (Araneae) along an altitudinal gradient on Kozuf Mountain (North Macedonia)
  16. Fiktionen, Mythen, Realitäten
  17. Cues from Facial Expressions for Emotional Interfaces
  18. The relevance of international restoration principles for ecosystem restoration practice in Rwanda
  19. Can cross-group contact predict advantaged group member’s willingness to engage in costly solidarity-based actions? Yes, if the contact is politicized
  20. The diffusion of sustainable family farming practices in Colombia
  21. Factors affecting fruit set in Aizoaceae species of the Succulent Karoo
  22. Joseph Heller
  23. Running off the road