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The multipole resonance probe: Evolution of a plasma sensor

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Standard

The multipole resonance probe: Evolution of a plasma sensor. / Schulz, Christian; Rolfes, Ilona; Styrnoll, Tim et al.
IEEE Sensors 2013: Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc., 2013. p. 1-4 (IEEE Sensors Conference).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Harvard

Schulz, C, Rolfes, I, Styrnoll, T, Awakowicz, P, Oberrath, J, Mussenbrock, T, Brinkmann, RP, Storch, R & Musch, T 2013, The multipole resonance probe: Evolution of a plasma sensor. in IEEE Sensors 2013: Proceedings. IEEE Sensors Conference, IEEE - Institute of Electrical and Electronics Engineers Inc., pp. 1-4, IEEE Sensors Conference - 2013, Baltimore, United States, 03.11.13. https://doi.org/10.1109/ICSENS.2013.6688324

APA

Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., & Musch, T. (2013). The multipole resonance probe: Evolution of a plasma sensor. In IEEE Sensors 2013: Proceedings (pp. 1-4). (IEEE Sensors Conference). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2013.6688324

Vancouver

Schulz C, Rolfes I, Styrnoll T, Awakowicz P, Oberrath J, Mussenbrock T et al. The multipole resonance probe: Evolution of a plasma sensor. In IEEE Sensors 2013: Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc. 2013. p. 1-4. (IEEE Sensors Conference). doi: 10.1109/ICSENS.2013.6688324

Bibtex

@inbook{1e78725dabf944479ae553486323ac4e,
title = "The multipole resonance probe: Evolution of a plasma sensor",
abstract = "A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. {\textcopyright} 2013 IEEE.",
keywords = "Engineering",
author = "Christian Schulz and Ilona Rolfes and Tim Styrnoll and Peter Awakowicz and Jens Oberrath and Thomas Mussenbrock and Brinkmann, {Ralf Peter} and Robert Storch and Thomas Musch",
year = "2013",
doi = "10.1109/ICSENS.2013.6688324",
language = "English",
isbn = "978-1-4673-4641-2",
series = "IEEE Sensors Conference",
publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",
pages = "1--4",
booktitle = "IEEE Sensors 2013",
address = "United States",
note = "IEEE Sensors Conference - 2013, IEEE Sensor 2013 ; Conference date: 03-11-2013 Through 06-11-2013",
url = "http://ieee-sensors2013.org/",

}

RIS

TY - CHAP

T1 - The multipole resonance probe: Evolution of a plasma sensor

AU - Schulz, Christian

AU - Rolfes, Ilona

AU - Styrnoll, Tim

AU - Awakowicz, Peter

AU - Oberrath, Jens

AU - Mussenbrock, Thomas

AU - Brinkmann, Ralf Peter

AU - Storch, Robert

AU - Musch, Thomas

N1 - Conference code: 12

PY - 2013

Y1 - 2013

N2 - A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. © 2013 IEEE.

AB - A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. © 2013 IEEE.

KW - Engineering

UR - http://www.scopus.com/inward/record.url?scp=84893948968&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/aba5cc09-1dd7-3f37-93b8-e717b59d821b/

U2 - 10.1109/ICSENS.2013.6688324

DO - 10.1109/ICSENS.2013.6688324

M3 - Article in conference proceedings

AN - SCOPUS:84893948968

SN - 978-1-4673-4641-2

T3 - IEEE Sensors Conference

SP - 1

EP - 4

BT - IEEE Sensors 2013

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE Sensors Conference - 2013

Y2 - 3 November 2013 through 6 November 2013

ER -

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DOI

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