1. //
  2. Start
  3. //
  4. Publications
  5. Planar multipole resonance probe
  6. Output formats
  7. //

Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Standard

Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation. / Friedrichs, Michael; Pohle, Dennis; Rolfes, Ilona et al.
2019 Kleinheubach Conference, KHB 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 2019. 8890211 (2019 Kleinheubach Conference, KHB 2019).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Harvard

Friedrichs, M, Pohle, D, Rolfes, I & Oberrath, J 2019, Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation. in 2019 Kleinheubach Conference, KHB 2019., 8890211, 2019 Kleinheubach Conference, KHB 2019, IEEE - Institute of Electrical and Electronics Engineers Inc., Piscataway, Kleinheubach Conference - KHB 2019, Miltenberg, Germany, 23.09.19. <https://ieeexplore.ieee.org/document/8890211/authors#authors>

APA

Friedrichs, M., Pohle, D., Rolfes, I., & Oberrath, J. (2019). Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation. In 2019 Kleinheubach Conference, KHB 2019 Article 8890211 (2019 Kleinheubach Conference, KHB 2019). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://ieeexplore.ieee.org/document/8890211/authors#authors

Vancouver

Friedrichs M, Pohle D, Rolfes I, Oberrath J. Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation. In 2019 Kleinheubach Conference, KHB 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc. 2019. 8890211. (2019 Kleinheubach Conference, KHB 2019).

Bibtex

@inbook{ff0f44e7059e4fd69df327aa6f4169f0,
title = "Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation",
abstract = "The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.",
keywords = "Active plasma resonance spectroscopy, Multipole resonance probe, Planar multipole resonance probe, Plasma diagnostics, Engineering",
author = "Michael Friedrichs and Dennis Pohle and Ilona Rolfes and Jens Oberrath",
year = "2019",
month = sep,
day = "1",
language = "English",
isbn = "978-1-7281-3161-0",
series = "2019 Kleinheubach Conference, KHB 2019",
publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 Kleinheubach Conference, KHB 2019",
address = "United States",
note = "Kleinheubach Conference - KHB 2019, KHB ; Conference date: 23-09-2019 Through 25-09-2019",
url = "https://www.kh2019.de/",

}

RIS

TY - CHAP

T1 - Planar multipole resonance probe

T2 - Kleinheubach Conference - KHB 2019

AU - Friedrichs, Michael

AU - Pohle, Dennis

AU - Rolfes, Ilona

AU - Oberrath, Jens

PY - 2019/9/1

Y1 - 2019/9/1

N2 - The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.

AB - The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.

KW - Active plasma resonance spectroscopy

KW - Multipole resonance probe

KW - Planar multipole resonance probe

KW - Plasma diagnostics

KW - Engineering

UR - http://www.scopus.com/inward/record.url?scp=85075176773&partnerID=8YFLogxK

UR - https://ieeexplore.ieee.org/document/8890211

M3 - Article in conference proceedings

SN - 978-1-7281-3161-0

T3 - 2019 Kleinheubach Conference, KHB 2019

BT - 2019 Kleinheubach Conference, KHB 2019

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

CY - Piscataway

Y2 - 23 September 2019 through 25 September 2019

ER -

Other publications by the same author(s)

Numerical study of electrode vaporization rates in an Automotive HVDC Relay in hydrogen and open air in a short circuit situation

Ewuntomah, C. M. & Oberrath, J., 2021, Proceedings of the 66th IEEE Holm Conference on Electrical Contacts, HLM 2021. Institute of Electrical and Electronics Engineers Inc., p. 24-31 8 p. (Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts; vol. 2021-October).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

2D Simulations of the NS-Laser Shock Peening

Pozdnyakov, V. & Oberrath, J., 06.2019, 2019 IEEE Pulsed Power and Plasma Science, PPPS 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 4 p. 9009984. (IEEE International Pulsed Power Conference; vol. 2019-June).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Pohle, D., Schulz, C., Oberberg, M., Friedrichs, M., Serwa, A., Uhlig, P., Oberrath, J., Awakowicz, P. & Rolfes, I., 16.01.2019, 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., p. 1315-1317 3 p. 8617552. (Asia-Pacific Microwave Conference Proceedings, APMC; vol. 2018-November).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Global modelling of the ns-laser shock peening

Pozdnyakov, V., Keller, S., Klusemann, B., Kashaev, N. & Oberrath, J., 03.2019, DPG-Frühjahrstagung der Sektion Materie und Kosmos (SMuK) : mit den Fachverbänden (sektionszugehörig): Extraterrestrische Physik, Gravitation und Relativitätstheorie, Physik der Hadronenund Kerne, Theoretische und Mathematische Grundlagen der Physik sowie weiteren Fachverbänden: Geschichte der Physik, Kurzzeit- und angewandte Laserphysik, Plasmaphysik, Umweltphysik und den Arbeitskreisen bzw. der Arbeitsgruppe: Beschleunigerphysik, Chancengleichheit, Junge DPG, Philosophie der Physik. Bad Honnef: Deutsche Physikalische Gesellschaft, p. 151 1 p. K 6.1. (Verhandlung der Deutschen Physikalischen Gesellschaft, Reihe 6; vol. 54, no. 2).

Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review

Plasma arcing during contact separation of HVDC relays

Ewuntomah, C. M. & Oberrath, J., 2019, DPG-Frühjahrstagung der Sektion Materie und Kosmos (SMuK): mit den Fachverbänden (sektionszugehörig) Extraterrestrische Physik, Gravitation und Relativitätstheorie, Physik der Hadronen und Kerne, Theoretische und Mathematische Grundlagen der Physik sowie weiteren Fachverbänden Geschichte der Physik, Kurzzeit- und angewandte Laserphysik, Plasmaphysik, Umweltphysik und den Arbeitskreisen bzw. der Arbeitsgruppe Beschleunigerphysik, Chancengleichheit, Junge DPG, Philosophie der Physik : 17.-22. März 2019, Technische Universität München. Nunner, B. (ed.). Bad Honnef: Deutsche Physikalische Gesellschaft e.V., p. 181 1 p. (Verhandlung der Deutschen Physikalischen Gesellschaft, Reihe 6; vol. 54, 2).

Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review

Links

Recently viewed

Publications

  1. A review of FEM code accuracy for reliable extrusion process analysis
  2. The IRENA Project Navigator
  3. Classifying railway stations for strategic transport and land use planning
  4. A general result on absolute continuity of non-uniform self-similar measures on the real line
  5. B7-H1 Selectively Controls TH17 Differentiation and Central Nervous System Autoimmunity via a Novel Non-PD-1-Mediated Pathway
  6. Similar factors underlie tree abundance in forests in native and alien ranges
  7. Propagation of particles injected from interplanetary shocks
  8. Bifurcation loads of circular curved beams of glued-laminated timber with continuous lateral support
  9. MICSIM-4J - A General Microsimulation Model
  10. Analysis of observability of a differential equation system describing a synchronous electromagnetic drive
  11. Associations between the financial and industry expertise of audit committee members and Key Audit Matters within related audit reports
  12. Microstructure and hardness evolution of laser metal deposited AA5087 wall-structures
  13. The multi-criteria effectiveness evaluation of the robotic group based on 3D real-time vision system
  14. The ESBW Short Scale A Test for Assessing Teachers’ Standards-Based Educational Knowledge
  15. Intra-specific leaf trait responses to species richness at two different local scales
  16. Traits of butterfly communities change from specialist to generalist characteristics with increasing land-use intensity
  17. Abnormal extrusion texture and reversed yield asymmetry in a Mg–Y-Sm-Zn-Zr alloy
  18. Microstructure and creep properties of MEZ magnesium alloy processed by thixocasting
  19. Efficient Classification of Images with Taxonomies
  20. Anisotropic wavelet bases and thresholding
  21. Recent developments in the manufacture of complex components by influencing the material flow during extrusion
  22. Sensitivity of trace-element analysis by X-ray emission induced by 0.1-10 MeV electrons
  23. An extended kalman filter for temperature monitoring of a metal-polymer hybrid fibre based heater structure
  24. Revisiting Carbon Disclosure and Performance
  25. Aluminium-rich coring structures in Mg-Al alloys with carbon inoculation
  26. An EEG frequency tagging study on biological motion perception in children with DCD
  27. The Cox ring of the space of complete rank two collineations
  28. Microstructure, mechanical and corrosion properties of Mg-Gd-Zn alloys
  29. Peer Evaluation Can Reliably Measure Local Knowledge
  30. Helping to improve suggestion systems
  31. Study on Mg–Si–Sr ternary alloys for biomedical applications
  32. Robust Current Decoupling in a Permanent Magnet Motor Combining a Geometric Method and SMC