1. //
  2. Start
  3. //
  4. Publications
  5. The multipole resonance probe
  6. Output formats
  7. //

The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Standard

The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. / Schulz, Christian; Rolfes, Ilona; Styrnoll, Tim et al.
42nd European Microwave Conference (EuMC 2012): Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc., 2012. p. 566-569.

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Harvard

Schulz, C, Rolfes, I, Styrnoll, T, Awakowicz, P, Lapke, M, Oberrath, J, Mussenbrock, T, Brinkmann, RP, Storch, R & Musch, T 2012, The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. in 42nd European Microwave Conference (EuMC 2012): Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc., pp. 566-569, 42nd European Microwave Conference - EuMC 2012, Amsterdam, Netherlands, 29.10.12. https://doi.org/10.23919/EuMC.2012.6459256

APA

Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Lapke, M., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., & Musch, T. (2012). The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. In 42nd European Microwave Conference (EuMC 2012): Proceedings (pp. 566-569). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/EuMC.2012.6459256

Vancouver

Schulz C, Rolfes I, Styrnoll T, Awakowicz P, Lapke M, Oberrath J et al. The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. In 42nd European Microwave Conference (EuMC 2012): Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc. 2012. p. 566-569 doi: 10.23919/EuMC.2012.6459256

Bibtex

@inbook{b46fcfb6a3e44721a28e35b881b55061,
title = "The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations",
abstract = "A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. {\textcopyright} 2012 EUROPEAN MICROWAVE ASSOC.",
keywords = "Engineering, 3D-electromagnetic field simulation, active plasma resonance spectroscopy, multipole resonance probe, plasma diagnostics",
author = "Christian Schulz and Ilona Rolfes and Tim Styrnoll and Peter Awakowicz and Martin Lapke and Jens Oberrath and Thomas Mussenbrock and Brinkmann, {Ralf Peter} and Robert Storch and Thomas Musch",
year = "2012",
doi = "10.23919/EuMC.2012.6459256",
language = "English",
isbn = "978-2-87487-027-9",
pages = "566--569",
booktitle = "42nd European Microwave Conference (EuMC 2012)",
publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",
address = "United States",
note = "42nd European Microwave Conference - EuMC 2012, EuMC 2012 ; Conference date: 29-10-2012 Through 01-11-2012",
url = "http://www.wikicfp.com/cfp/servlet/event.showcfp?eventid=20479",

}

RIS

TY - CHAP

T1 - The multipole resonance probe

T2 - 42nd European Microwave Conference - EuMC 2012

AU - Schulz, Christian

AU - Rolfes, Ilona

AU - Styrnoll, Tim

AU - Awakowicz, Peter

AU - Lapke, Martin

AU - Oberrath, Jens

AU - Mussenbrock, Thomas

AU - Brinkmann, Ralf Peter

AU - Storch, Robert

AU - Musch, Thomas

N1 - Conference code: 42

PY - 2012

Y1 - 2012

N2 - A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.

AB - A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.

KW - Engineering

KW - 3D-electromagnetic field simulation

KW - active plasma resonance spectroscopy

KW - multipole resonance probe

KW - plasma diagnostics

UR - http://www.scopus.com/inward/record.url?scp=84874629353&partnerID=8YFLogxK

UR - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6459256&newsearch=true&queryText=%20multipole%20resonance%20probe

U2 - 10.23919/EuMC.2012.6459256

DO - 10.23919/EuMC.2012.6459256

M3 - Article in conference proceedings

AN - SCOPUS:84874629353

SN - 978-2-87487-027-9

SP - 566

EP - 569

BT - 42nd European Microwave Conference (EuMC 2012)

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

Y2 - 29 October 2012 through 1 November 2012

ER -

Other publications by the same author(s)

Numerical study of electrode vaporization rates in an Automotive HVDC Relay in hydrogen and open air in a short circuit situation

Ewuntomah, C. M. & Oberrath, J., 2021, Proceedings of the 66th IEEE Holm Conference on Electrical Contacts, HLM 2021. Institute of Electrical and Electronics Engineers Inc., p. 24-31 8 p. (Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts; vol. 2021-October).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

2D Simulations of the NS-Laser Shock Peening

Pozdnyakov, V. & Oberrath, J., 06.2019, 2019 IEEE Pulsed Power and Plasma Science, PPPS 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 4 p. 9009984. (IEEE International Pulsed Power Conference; vol. 2019-June).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Pohle, D., Schulz, C., Oberberg, M., Friedrichs, M., Serwa, A., Uhlig, P., Oberrath, J., Awakowicz, P. & Rolfes, I., 16.01.2019, 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., p. 1315-1317 3 p. 8617552. (Asia-Pacific Microwave Conference Proceedings, APMC; vol. 2018-November).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Global modelling of the ns-laser shock peening

Pozdnyakov, V., Keller, S., Klusemann, B., Kashaev, N. & Oberrath, J., 03.2019, DPG-Frühjahrstagung der Sektion Materie und Kosmos (SMuK) : mit den Fachverbänden (sektionszugehörig): Extraterrestrische Physik, Gravitation und Relativitätstheorie, Physik der Hadronenund Kerne, Theoretische und Mathematische Grundlagen der Physik sowie weiteren Fachverbänden: Geschichte der Physik, Kurzzeit- und angewandte Laserphysik, Plasmaphysik, Umweltphysik und den Arbeitskreisen bzw. der Arbeitsgruppe: Beschleunigerphysik, Chancengleichheit, Junge DPG, Philosophie der Physik. Bad Honnef: Deutsche Physikalische Gesellschaft, p. 151 1 p. K 6.1. (Verhandlung der Deutschen Physikalischen Gesellschaft, Reihe 6; vol. 54, no. 2).

Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review

Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation

Friedrichs, M., Pohle, D., Rolfes, I. & Oberrath, J., 01.09.2019, 2019 Kleinheubach Conference, KHB 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 8890211. (2019 Kleinheubach Conference, KHB 2019).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

DOI

Recently viewed