The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations

Research output: Contributions to collected editions/worksArticle in conference proceedingsResearchpeer-review

Authors

  • Christian Schulz
  • Ilona Rolfes
  • Tim Styrnoll
  • Peter Awakowicz
  • Martin Lapke
  • Jens Oberrath
  • Thomas Mussenbrock
  • Ralf Peter Brinkmann
  • Robert Storch
  • Thomas Musch
A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.
Original languageEnglish
Title of host publication42nd European Microwave Conference (EuMC 2012) : Proceedings
Number of pages4
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Publication date2012
Pages566-569
ISBN (print)978-2-87487-027-9
ISBN (electronic)978-1-4673-2215-7 , 978-2-87487-026-2
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event42nd European Microwave Conference - EuMC 2012 - Amsterdam, Netherlands
Duration: 29.10.201201.11.2012
Conference number: 42
http://www.wikicfp.com/cfp/servlet/event.showcfp?eventid=20479

    Research areas

  • Engineering - 3D-electromagnetic field simulation, active plasma resonance spectroscopy, multipole resonance probe, plasma diagnostics

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