The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations
Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review
Authors
A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.
| Original language | English |
|---|---|
| Title of host publication | 42nd European Microwave Conference (EuMC 2012) : Proceedings |
| Number of pages | 4 |
| Publisher | IEEE - Institute of Electrical and Electronics Engineers Inc. |
| Publication date | 2012 |
| Pages | 566-569 |
| ISBN (print) | 978-2-87487-027-9 |
| ISBN (electronic) | 978-1-4673-2215-7 , 978-2-87487-026-2 |
| DOIs | |
| Publication status | Published - 2012 |
| Externally published | Yes |
| Event | 42nd European Microwave Conference - EuMC 2012 - Amsterdam, Netherlands Duration: 29.10.2012 → 01.11.2012 Conference number: 42 http://www.wikicfp.com/cfp/servlet/event.showcfp?eventid=20479 |
- Engineering - 3D-electromagnetic field simulation, active plasma resonance spectroscopy, multipole resonance probe, plasma diagnostics