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The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Authors

  • Christian Schulz
  • Ilona Rolfes
  • Tim Styrnoll
  • Peter Awakowicz
  • Martin Lapke
  • Jens Oberrath
  • Thomas Mussenbrock
  • Ralf Peter Brinkmann
  • Robert Storch
  • Thomas Musch
A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.
Original languageEnglish
Title of host publication42nd European Microwave Conference (EuMC 2012) : Proceedings
Number of pages4
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Publication date2012
Pages566-569
ISBN (print)978-2-87487-027-9
ISBN (electronic)978-1-4673-2215-7 , 978-2-87487-026-2
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event42nd European Microwave Conference - EuMC 2012 - Amsterdam, Netherlands
Duration: 29.10.2012 → 01.11.2012
Conference number: 42
http://www.wikicfp.com/cfp/servlet/event.showcfp?eventid=20479

    Research areas

  • Engineering - 3D-electromagnetic field simulation, active plasma resonance spectroscopy, multipole resonance probe, plasma diagnostics

Other publications by the same author(s)

Numerical study of electrode vaporization rates in an Automotive HVDC Relay in hydrogen and open air in a short circuit situation

Ewuntomah, C. M. & Oberrath, J., 2021, Proceedings of the 66th IEEE Holm Conference on Electrical Contacts, HLM 2021. Institute of Electrical and Electronics Engineers Inc., p. 24-31 8 p. (Electrical Contacts, Proceedings of the Annual Holm Conference on Electrical Contacts; vol. 2021-October).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

2D Simulations of the NS-Laser Shock Peening

Pozdnyakov, V. & Oberrath, J., 06.2019, 2019 IEEE Pulsed Power and Plasma Science, PPPS 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 4 p. 9009984. (IEEE International Pulsed Power Conference; vol. 2019-June).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Pohle, D., Schulz, C., Oberberg, M., Friedrichs, M., Serwa, A., Uhlig, P., Oberrath, J., Awakowicz, P. & Rolfes, I., 16.01.2019, 2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., p. 1315-1317 3 p. 8617552. (Asia-Pacific Microwave Conference Proceedings, APMC; vol. 2018-November).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

Global modelling of the ns-laser shock peening

Pozdnyakov, V., Keller, S., Klusemann, B., Kashaev, N. & Oberrath, J., 03.2019, DPG-Frühjahrstagung der Sektion Materie und Kosmos (SMuK) : mit den Fachverbänden (sektionszugehörig): Extraterrestrische Physik, Gravitation und Relativitätstheorie, Physik der Hadronenund Kerne, Theoretische und Mathematische Grundlagen der Physik sowie weiteren Fachverbänden: Geschichte der Physik, Kurzzeit- und angewandte Laserphysik, Plasmaphysik, Umweltphysik und den Arbeitskreisen bzw. der Arbeitsgruppe: Beschleunigerphysik, Chancengleichheit, Junge DPG, Philosophie der Physik. Bad Honnef: Deutsche Physikalische Gesellschaft, p. 151 1 p. K 6.1. (Verhandlung der Deutschen Physikalischen Gesellschaft, Reihe 6; vol. 54, no. 2).

Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review

Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation

Friedrichs, M., Pohle, D., Rolfes, I. & Oberrath, J., 01.09.2019, 2019 Kleinheubach Conference, KHB 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 8890211. (2019 Kleinheubach Conference, KHB 2019).

Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review

DOI

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