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The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations

Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › begutachtet

Standard

The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. / Schulz, Christian; Rolfes, Ilona; Styrnoll, Tim et al.
42nd European Microwave Conference (EuMC 2012): Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc., 2012. S. 566-569.

Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › begutachtet

Harvard

Schulz, C, Rolfes, I, Styrnoll, T, Awakowicz, P, Lapke, M, Oberrath, J, Mussenbrock, T, Brinkmann, RP, Storch, R & Musch, T 2012, The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. in 42nd European Microwave Conference (EuMC 2012): Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc., S. 566-569, 42nd European Microwave Conference - EuMC 2012, Amsterdam, Niederlande, 29.10.12. https://doi.org/10.23919/EuMC.2012.6459256

APA

Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Lapke, M., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., & Musch, T. (2012). The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. In 42nd European Microwave Conference (EuMC 2012): Proceedings (S. 566-569). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/EuMC.2012.6459256

Vancouver

Schulz C, Rolfes I, Styrnoll T, Awakowicz P, Lapke M, Oberrath J et al. The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations. in 42nd European Microwave Conference (EuMC 2012): Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc. 2012. S. 566-569 doi: 10.23919/EuMC.2012.6459256

Bibtex

@inbook{b46fcfb6a3e44721a28e35b881b55061,
title = "The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations",
abstract = "A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. {\textcopyright} 2012 EUROPEAN MICROWAVE ASSOC.",
keywords = "Engineering, 3D-electromagnetic field simulation, active plasma resonance spectroscopy, multipole resonance probe, plasma diagnostics",
author = "Christian Schulz and Ilona Rolfes and Tim Styrnoll and Peter Awakowicz and Martin Lapke and Jens Oberrath and Thomas Mussenbrock and Brinkmann, {Ralf Peter} and Robert Storch and Thomas Musch",
year = "2012",
doi = "10.23919/EuMC.2012.6459256",
language = "English",
isbn = "978-2-87487-027-9",
pages = "566--569",
booktitle = "42nd European Microwave Conference (EuMC 2012)",
publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",
address = "United States",
note = "42nd European Microwave Conference - EuMC 2012, EuMC 2012 ; Conference date: 29-10-2012 Through 01-11-2012",
url = "http://www.wikicfp.com/cfp/servlet/event.showcfp?eventid=20479",

}

RIS

TY - CHAP

T1 - The multipole resonance probe

T2 - 42nd European Microwave Conference - EuMC 2012

AU - Schulz, Christian

AU - Rolfes, Ilona

AU - Styrnoll, Tim

AU - Awakowicz, Peter

AU - Lapke, Martin

AU - Oberrath, Jens

AU - Mussenbrock, Thomas

AU - Brinkmann, Ralf Peter

AU - Storch, Robert

AU - Musch, Thomas

N1 - Conference code: 42

PY - 2012

Y1 - 2012

N2 - A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.

AB - A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.

KW - Engineering

KW - 3D-electromagnetic field simulation

KW - active plasma resonance spectroscopy

KW - multipole resonance probe

KW - plasma diagnostics

UR - http://www.scopus.com/inward/record.url?scp=84874629353&partnerID=8YFLogxK

UR - http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6459256&newsearch=true&queryText=%20multipole%20resonance%20probe

U2 - 10.23919/EuMC.2012.6459256

DO - 10.23919/EuMC.2012.6459256

M3 - Article in conference proceedings

AN - SCOPUS:84874629353

SN - 978-2-87487-027-9

SP - 566

EP - 569

BT - 42nd European Microwave Conference (EuMC 2012)

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

Y2 - 29 October 2012 through 1 November 2012

ER -

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DOI

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