The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations
Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › begutachtet
Authors
A novel industry compatible plasma probe for the simultaneous determination of the most important process parameters for supervision and control of technical plasmas is presented in this paper. 3D-electromagnetic field simulations are used for optimization of the so called multipole resonance probe. In addition, the influence of different parameters of a modelled plasma on the probe is investigated. Good agreements between simulations and measurements of a prototype in a double inductive coupled plasma confirm the observed behaviour within the simulated plasmas. This allows an efficient preliminary investigation of the probe. © 2012 EUROPEAN MICROWAVE ASSOC.
| Originalsprache | Englisch |
|---|---|
| Titel | 42nd European Microwave Conference (EuMC 2012) : Proceedings |
| Anzahl der Seiten | 4 |
| Verlag | IEEE - Institute of Electrical and Electronics Engineers Inc. |
| Erscheinungsdatum | 2012 |
| Seiten | 566-569 |
| ISBN (Print) | 978-2-87487-027-9 |
| ISBN (elektronisch) | 978-1-4673-2215-7 , 978-2-87487-026-2 |
| DOIs | |
| Publikationsstatus | Erschienen - 2012 |
| Extern publiziert | Ja |
| Veranstaltung | 42nd European Microwave Conference - EuMC 2012 - Amsterdam, Niederlande Dauer: 29.10.2012 → 01.11.2012 Konferenznummer: 42 http://www.wikicfp.com/cfp/servlet/event.showcfp?eventid=20479 |
- Ingenieurwissenschaften