Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

Research output: Journal contributionsConference abstract in journalResearchpeer-review

Standard

Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach. / Friedrichs, Michael; Gong, Junbo; Brinkmann, Ralf Peter et al.
In: Bulletin of the American Physical Society, Vol. 61, No. 9, 11.10.2016, p. 42.

Research output: Journal contributionsConference abstract in journalResearchpeer-review

Harvard

APA

Vancouver

Bibtex

@article{38e5b782ff314d07bd6d5e9973e184a7,
title = "Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach",
abstract = "Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.",
keywords = "Engineering",
author = "Michael Friedrichs and Junbo Gong and Brinkmann, {Ralf Peter} and Jens Oberrath and Sebastian Wilczek",
note = "69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041",
year = "2016",
month = oct,
day = "11",
language = "English",
volume = "61",
pages = "42",
journal = "Bulletin of the American Physical Society",
issn = "0003-0503",
publisher = "American Physical Society",
number = "9",

}

RIS

TY - JOUR

T1 - Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

AU - Friedrichs, Michael

AU - Gong, Junbo

AU - Brinkmann, Ralf Peter

AU - Oberrath, Jens

AU - Wilczek, Sebastian

N1 - 69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041

PY - 2016/10/11

Y1 - 2016/10/11

N2 - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.

AB - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.

KW - Engineering

M3 - Conference abstract in journal

VL - 61

SP - 42

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

SN - 0003-0503

IS - 9

ER -

Recently viewed

Researchers

  1. Lillan Lommel

Publications

  1. Liability rule failures? Evidence from german court decisions.
  2. Strain in railroad maintenance workers caused by passing high-speed trains
  3. Tuning into Things
  4. The psychological strategy process and socio-demographic variables as predictors of success in micro- and small-sacle business owners in Zambia
  5. The 'West' versus 'the Rest'? Festival Curators as Gatekeepers for Sociocultural Diversity
  6. Die Welt von morgen mitgestalten
  7. Das Burnout-Phänomen am Beispiel des Lehrerberufs.
  8. The hidden power of language
  9. Decentering the argumentative turn
  10. Cooperating With “Open Cards”—The Role of Small Intermediary Businesses in Realizing Sustainable International Coffee Supply
  11. Aí é orixá!
  12. Democratization
  13. Dynamic tensile properties and microstructural evolution of extruded EW75 magnesium alloy at high strain rates
  14. Determinants of materiality disclosure quality in integrated reporting
  15. Overclaiming is not related to dark triad personality traits or stated and revealed risk preferences
  16. An overview of current trends in european environmental education
  17. Where you search is what you get
  18. Rapping against Old and New Nazis: Bejarano and Microphone Mafia’s Multidirectional Musical Memory Work
  19. Buche oder Eiche
  20. The 6-month effectiveness of Internet-based guided self-help for depression in adults with Type 1 and 2 diabetes mellitus
  21. Entrepreneurship and the "theory of planned behavior"
  22. Digital health literacy and subjective wellbeing in the context of COVID-19
  23. Neue Technologien in der Umfrageforschung
  24. Verwaltungsrecht
  25. A.3 Altersbezogene Unterschiede bei der Interaktion mit einem Virtual-Reality-System
  26. Beihilfen im Agrarsektor
  27. Visual Accounting
  28. Click Here to Shop Now!
  29. Biophysical variability and politico-economic singularity