The multipole resonance probe: kinetic damping in its spectra

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The multipole resonance probe (MRP) has become an accepted diagnostic tool to measure electron densities in low pressure plasmas within the last decade. It excites a resonance of the dipole mode, where the resonance frequency is proportional to the electron plasma frequency. To allow for the measurement of electron density and temperature simultaneously, a second resonance parameter is necessary. A good candidate is the half width of the resonance peak, which is connected to the damping of the probe-plasma system and thus dependent on the electron temperature. However, in low pressure plasmas, the resonance peak is broadened due to kinetic effects, which requires a kinetic model. Such a model in electrostatic approximation based on functional analytic methods for a general probe geometry has been presented [1]. Based on the general solution of this model, the system response function Y of the MRP has to be approximated to determine specific spectra. These spectra show clearly a broadening of the resonance peak due to kinetic effects. The goal of ongoing research is to derive a relation between the half width and the electron temperature.\\ [1] J. Oberrath and R.P. Brinkmann, Plasma Sources Sci. Technol. 23, 045006 (2014).
Original languageEnglish
Article numberTF3.00005
JournalBulletin of the American Physical Society
Number of pages1
Publication statusPublished - 2018
Event71st Annual Gaseous Electronics Conference - Oregon Convention Center in downtown, Portland, United States
Duration: 05.11.201809.11.2018
Conference number: 71

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