Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

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Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach. / Friedrichs, Michael; Gong, Junbo; Brinkmann, Ralf Peter et al.
in: Bulletin of the American Physical Society, Jahrgang 61, Nr. 9, 11.10.2016, S. 42.

Publikation: Beiträge in ZeitschriftenKonferenz-Abstracts in FachzeitschriftenForschungbegutachtet

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@article{38e5b782ff314d07bd6d5e9973e184a7,
title = "Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach",
abstract = "Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.",
keywords = "Engineering",
author = "Michael Friedrichs and Junbo Gong and Brinkmann, {Ralf Peter} and Jens Oberrath and Sebastian Wilczek",
note = "69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041",
year = "2016",
month = oct,
day = "11",
language = "English",
volume = "61",
pages = "42",
journal = "Bulletin of the American Physical Society",
issn = "0003-0503",
publisher = "American Physical Society",
number = "9",

}

RIS

TY - JOUR

T1 - Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

AU - Friedrichs, Michael

AU - Gong, Junbo

AU - Brinkmann, Ralf Peter

AU - Oberrath, Jens

AU - Wilczek, Sebastian

N1 - 69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041

PY - 2016/10/11

Y1 - 2016/10/11

N2 - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.

AB - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.

KW - Engineering

M3 - Conference abstract in journal

VL - 61

SP - 42

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

SN - 0003-0503

IS - 9

ER -

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