Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach
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in: Bulletin of the American Physical Society, Jahrgang 61, Nr. 9, 11.10.2016, S. 42.
Publikation: Beiträge in Zeitschriften › Konferenz-Abstracts in Fachzeitschriften › Forschung › begutachtet
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TY - JOUR
T1 - Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach
AU - Friedrichs, Michael
AU - Gong, Junbo
AU - Brinkmann, Ralf Peter
AU - Oberrath, Jens
AU - Wilczek, Sebastian
N1 - 69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany. Abstract: HT6.00041
PY - 2016/10/11
Y1 - 2016/10/11
N2 - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.
AB - Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the in uence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application. A solution to combine the bene ts of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP). Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and rst simulation results are presented.
KW - Engineering
M3 - Conference abstract in journal
VL - 61
SP - 42
JO - Bulletin of the American Physical Society
JF - Bulletin of the American Physical Society
SN - 0003-0503
IS - 9
ER -