TY - JOUR

T1 - Kinetic Damping in the Spectrum of the Spherical Impedance Probe

AU - Oberrath, Jens

AU - Brinkmann, Ralf Peter

N1 - 68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing, October 12–16, 2015; Honolulu, Hawaii Abstract ID: BAPS.2015.GEC.ET3.4

PY - 2015/10

Y1 - 2015/10

N2 - Active plasma resonance spectroscopy is a widely used diagnostic method and several probes in different designs have been invented. One of them is the Spherical Impedance Probe. Its resonance behavior and the influence of kinetic effects on it can be described by a general kinetic model presented by the authors [1]. It was theoretically shown that kinetic effects are responsible for a broadening of the resonance peak in the spectrum. However, the broadening of the resonance peak in a kinetically determined spectrum in the geometry of an existing probe is not evaluated, yet. We present such a spectrum of the Spherical Impedance Probe. Therefore, the general solution of the model is expanded in an orthonormal system of basis-functions. This expansion is truncated to determine an approximated spectrum. Its resonance peak shows clearly a broadening compared to a peak in a spectrum, which is determined by a fluiddynamical model.\\[4pt] [1] J. Oberrath and R.P. Brinkmann, Plasma Sources Sci. Technol. 23, 045006 (2014)

AB - Active plasma resonance spectroscopy is a widely used diagnostic method and several probes in different designs have been invented. One of them is the Spherical Impedance Probe. Its resonance behavior and the influence of kinetic effects on it can be described by a general kinetic model presented by the authors [1]. It was theoretically shown that kinetic effects are responsible for a broadening of the resonance peak in the spectrum. However, the broadening of the resonance peak in a kinetically determined spectrum in the geometry of an existing probe is not evaluated, yet. We present such a spectrum of the Spherical Impedance Probe. Therefore, the general solution of the model is expanded in an orthonormal system of basis-functions. This expansion is truncated to determine an approximated spectrum. Its resonance peak shows clearly a broadening compared to a peak in a spectrum, which is determined by a fluiddynamical model.\\[4pt] [1] J. Oberrath and R.P. Brinkmann, Plasma Sources Sci. Technol. 23, 045006 (2014)

KW - Engineering

UR - http://meetings.aps.org/Meeting/GEC15/Session/ET3.4

M3 - Conference abstract in journal

VL - 60

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

SN - 0003-0503

IS - 9

ER -