TY - JOUR

T1 - Active plasma resonance spectroscopy

T2 - A functional analytic description

AU - Lapke, M.

AU - Oberrath, Jens

AU - Mussenbrock, T.

AU - Brinkmann, R. P.

PY - 2013/4

Y1 - 2013/4

N2 - The term 'active plasma resonance spectroscopy' denotes a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: a signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtain information on the electron density and other plasma parameters. In recent years, the concept has found renewed interest as a basis of industry compatible plasma diagnostics. This paper analyzes the diagnostic technique in terms of a general description based on functional analytic (or Hilbert Space) methods which hold for arbitrary probe geometries. It is shown that the response function of the plasma-probe system can be expressed as a matrix element of the resolvent of an appropriately defined dynamical operator. A specialization of the formalism to a symmetric probe design is given, as well as an interpretation in terms of a lumped circuit model consisting of series resonance circuits. We present ideas for an optimized probe design based on geometric and electrical symmetry. © 2013 IOP Publishing Ltd.

AB - The term 'active plasma resonance spectroscopy' denotes a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: a signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtain information on the electron density and other plasma parameters. In recent years, the concept has found renewed interest as a basis of industry compatible plasma diagnostics. This paper analyzes the diagnostic technique in terms of a general description based on functional analytic (or Hilbert Space) methods which hold for arbitrary probe geometries. It is shown that the response function of the plasma-probe system can be expressed as a matrix element of the resolvent of an appropriately defined dynamical operator. A specialization of the formalism to a symmetric probe design is given, as well as an interpretation in terms of a lumped circuit model consisting of series resonance circuits. We present ideas for an optimized probe design based on geometric and electrical symmetry. © 2013 IOP Publishing Ltd.

KW - Engineering

UR - http://www.scopus.com/inward/record.url?scp=84876240957&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/24f6c5f1-d748-3ab0-8028-bbb53b3ff4f6/

U2 - 10.1088/0963-0252/22/2/025005

DO - 10.1088/0963-0252/22/2/025005

M3 - Journal articles

AN - SCOPUS:84876240957

VL - 22

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

SN - 0963-0252

IS - 2

M1 - 025005

ER -