The multipole resonance probe: Evolution of a plasma sensor

Publikation: Beiträge in SammelwerkenAufsätze in KonferenzbändenForschungbegutachtet

Standard

The multipole resonance probe: Evolution of a plasma sensor. / Schulz, Christian; Rolfes, Ilona; Styrnoll, Tim et al.
IEEE Sensors 2013: Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc., 2013. S. 1-4 (IEEE Sensors Conference).

Publikation: Beiträge in SammelwerkenAufsätze in KonferenzbändenForschungbegutachtet

Harvard

Schulz, C, Rolfes, I, Styrnoll, T, Awakowicz, P, Oberrath, J, Mussenbrock, T, Brinkmann, RP, Storch, R & Musch, T 2013, The multipole resonance probe: Evolution of a plasma sensor. in IEEE Sensors 2013: Proceedings. IEEE Sensors Conference, IEEE - Institute of Electrical and Electronics Engineers Inc., S. 1-4, IEEE Sensors Conference - 2013, Baltimore, USA / Vereinigte Staaten, 03.11.13. https://doi.org/10.1109/ICSENS.2013.6688324

APA

Schulz, C., Rolfes, I., Styrnoll, T., Awakowicz, P., Oberrath, J., Mussenbrock, T., Brinkmann, R. P., Storch, R., & Musch, T. (2013). The multipole resonance probe: Evolution of a plasma sensor. In IEEE Sensors 2013: Proceedings (S. 1-4). (IEEE Sensors Conference). IEEE - Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSENS.2013.6688324

Vancouver

Schulz C, Rolfes I, Styrnoll T, Awakowicz P, Oberrath J, Mussenbrock T et al. The multipole resonance probe: Evolution of a plasma sensor. in IEEE Sensors 2013: Proceedings. IEEE - Institute of Electrical and Electronics Engineers Inc. 2013. S. 1-4. (IEEE Sensors Conference). doi: 10.1109/ICSENS.2013.6688324

Bibtex

@inbook{1e78725dabf944479ae553486323ac4e,
title = "The multipole resonance probe: Evolution of a plasma sensor",
abstract = "A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. {\textcopyright} 2013 IEEE.",
keywords = "Engineering",
author = "Christian Schulz and Ilona Rolfes and Tim Styrnoll and Peter Awakowicz and Jens Oberrath and Thomas Mussenbrock and Brinkmann, {Ralf Peter} and Robert Storch and Thomas Musch",
year = "2013",
doi = "10.1109/ICSENS.2013.6688324",
language = "English",
isbn = "978-1-4673-4641-2",
series = "IEEE Sensors Conference",
publisher = "IEEE - Institute of Electrical and Electronics Engineers Inc.",
pages = "1--4",
booktitle = "IEEE Sensors 2013",
address = "United States",
note = "IEEE Sensors Conference - 2013, IEEE Sensor 2013 ; Conference date: 03-11-2013 Through 06-11-2013",
url = "http://ieee-sensors2013.org/",

}

RIS

TY - CHAP

T1 - The multipole resonance probe: Evolution of a plasma sensor

AU - Schulz, Christian

AU - Rolfes, Ilona

AU - Styrnoll, Tim

AU - Awakowicz, Peter

AU - Oberrath, Jens

AU - Mussenbrock, Thomas

AU - Brinkmann, Ralf Peter

AU - Storch, Robert

AU - Musch, Thomas

N1 - Conference code: 12

PY - 2013

Y1 - 2013

N2 - A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. © 2013 IEEE.

AB - A robust and sensitive plasma probe, the multipole resonance probe (MRP), and its importance for industrial purposes is presented and discussed in this paper. Based on its innovative concept and its simple model of the system 'probe-plasma', a novel wall-mounted sensor is introduced. This sensor represents an optimized design of one sector of the MRP's assembly and is investigated within 3D-electromagnetic field simulations and compared to measurements of the MRP in an argon plasma. The resulting wall-mounted sensor can be designed for a desired application, which operates within a limited frequency range. The presented sensor covers a density range of approximately ne = 1016 m-3.. 1017 m-3, which is sufficient for the considered process. © 2013 IEEE.

KW - Engineering

UR - http://www.scopus.com/inward/record.url?scp=84893948968&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/aba5cc09-1dd7-3f37-93b8-e717b59d821b/

U2 - 10.1109/ICSENS.2013.6688324

DO - 10.1109/ICSENS.2013.6688324

M3 - Article in conference proceedings

AN - SCOPUS:84893948968

SN - 978-1-4673-4641-2

T3 - IEEE Sensors Conference

SP - 1

EP - 4

BT - IEEE Sensors 2013

PB - IEEE - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE Sensors Conference - 2013

Y2 - 3 November 2013 through 6 November 2013

ER -

DOI

Zuletzt angesehen

Publikationen

  1. Harmonisierungspotenziale zwischen in- und externem Rechnungswesen.
  2. Management operationeller Risiken in Kreditinstituten nach MaRisk
  3. Politische Meinungsbildung im Dialog von Wissenschaft und Politik
  4. Quality of External Communications from the Employee's Perspective
  5. Electoral systems and party systems in central and eastern Europe
  6. Potential negative consequences of mindfulness in the moral domain
  7. Strategien, strategische Orientierungen, strategische Entscheidungen.
  8. Corrosion behavior of Mg-Gd-Zn based alloys in aqueous NaCl solution
  9. Influence of Nd in extruded Mg10Gd base alloys on fatigue strength
  10. Spectral Kinetic Simulation of the Ideal Multipole Resonance Probe
  11. Stadt, lokale Politik, Variation. Annäherung an eine Forschungsagenda
  12. Towards a Heuristic for Scheduling Offshore Installation Processes
  13. Quantification of sources of PCBs to the atmosphere in urban areas
  14. "Doppelbotschaft vom wirklichen Liebenkönnen und vom Sterbenmüssen"
  15. Sex differences in general knowledge in German high school students
  16. A study on the hot deformation behavior of cast Mg-4Sn-2Ca (TX42) alloy
  17. Friedensbildlichkeit und Gesellschaftsbegriff zur Zeit der Romantik
  18. Modeling of microstructural pattern formation in crystal plasticity
  19. Arbeitsplatzdynamik in den Industriebetrieben Mecklenburg-Vorpommern
  20. Ein Referenz-Datenmodell für Online-Fragebögen im World Wide Web (WWW)
  21. Lebensweltorientiertes" service learning" als Bildungs-und Sozialarbeit?
  22. Strategie als Herausforderung für die deliberative Demokratietheorie
  23. Grenzüberschreitung: Verfassungsentwicklung und Internationalisierung
  24. Detection of oscillations with application in the pantograph control