A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Publikation: Beiträge in SammelwerkenAufsätze in KonferenzbändenForschungbegutachtet


A novel advanced design of the planar multipole resonance probe (pMRP) using LTCC-technology is investigated in this contribution. Integrated into the reactor wall, the planar sensor structure enables a minimally invasive in-situ plasma monitoring. Due to the ceramic substrate material, a substantial improved resistance against high temperatures can be achieved, extending the potential fields of application. The used multilayer structure with vertically stacked components ensures a high level of integration and further enhances the mechanical robustness leading to an industry compatible plasma sensor design. The probe is investigated within 3D electromagnetic simulations and its applicability is demonstrated by measurements in a double inductively coupled plasma (DICP).
Titel2018 Asia-Pacific Microwave Conference, APMC 2018 - Proceedings
Anzahl der Seiten3
VerlagIEEE - Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)978-1-5386-2184-4
ISBN (elektronisch)978-4-9023-3945-1
PublikationsstatusErschienen - 16.01.2019
Veranstaltung30th Asia-Pacific Microwave Conference 2018: Harmonious World Connected by Microwaves - Kyoto International Conference Center, Kyoto, Japan
Dauer: 06.11.201809.11.2018
Konferenznummer: 30

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Copyright 2018 IEICE, Date Added to IEEE Xplore: 17 January 2019