Kinetic Spectra of the Planar Multipole Resonance Probe
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Standard
In: Bulletin of the American Physical Society, Vol. 2018, TF3.00007, 09.11.2018.
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Harvard
APA
Vancouver
Bibtex
}
RIS
TY - JOUR
T1 - Kinetic Spectra of the Planar Multipole Resonance Probe
AU - Friedrichs, Michael
AU - Oberrath, Jens
N1 - Conference code: 71
PY - 2018/11/9
Y1 - 2018/11/9
N2 - The planar multipole resonance probe is suitable for industrial plasma diagnostic purposes and consists of two half-disc electrodes, which can be integrated into the chamber wall of the reactor. Due to its minimal invasive character, inner plasma parameters can be monitored during the process. Based on a fluid model it is possible to determine the electron density from a detected resonance frequency in the measured spectrum. However, to monitor also the electron temperature an additional resonance parameter, e.g. the half-width of the resonance peak, is necessary. It is strongly influenced by kinetic effects, therefore a study of a kinetic model to obtain a relation between the half-width and the electron temperature is required. In this work such a kinetic model based on functional analytic methods and first spectra are presented.
AB - The planar multipole resonance probe is suitable for industrial plasma diagnostic purposes and consists of two half-disc electrodes, which can be integrated into the chamber wall of the reactor. Due to its minimal invasive character, inner plasma parameters can be monitored during the process. Based on a fluid model it is possible to determine the electron density from a detected resonance frequency in the measured spectrum. However, to monitor also the electron temperature an additional resonance parameter, e.g. the half-width of the resonance peak, is necessary. It is strongly influenced by kinetic effects, therefore a study of a kinetic model to obtain a relation between the half-width and the electron temperature is required. In this work such a kinetic model based on functional analytic methods and first spectra are presented.
KW - Engineering
UR - http://meetings.aps.org/Meeting/GEC18/Session/TF3.7
M3 - Conference abstract in journal
VL - 2018
JO - Bulletin of the American Physical Society
JF - Bulletin of the American Physical Society
SN - 0003-0503
M1 - TF3.00007
T2 - 71st Annual Gaseous Electronics Conference
Y2 - 5 November 2018 through 9 November 2018
ER -