TY - JOUR

T1 - Kinetic Spectra of the Planar Multipole Resonance Probe

AU - Friedrichs, Michael

AU - Oberrath, Jens

N1 - Conference code: 71

PY - 2018/11/9

Y1 - 2018/11/9

N2 - The planar multipole resonance probe is suitable for industrial plasma diagnostic purposes and consists of two half-disc electrodes, which can be integrated into the chamber wall of the reactor. Due to its minimal invasive character, inner plasma parameters can be monitored during the process. Based on a fluid model it is possible to determine the electron density from a detected resonance frequency in the measured spectrum. However, to monitor also the electron temperature an additional resonance parameter, e.g. the half-width of the resonance peak, is necessary. It is strongly influenced by kinetic effects, therefore a study of a kinetic model to obtain a relation between the half-width and the electron temperature is required. In this work such a kinetic model based on functional analytic methods and first spectra are presented.

AB - The planar multipole resonance probe is suitable for industrial plasma diagnostic purposes and consists of two half-disc electrodes, which can be integrated into the chamber wall of the reactor. Due to its minimal invasive character, inner plasma parameters can be monitored during the process. Based on a fluid model it is possible to determine the electron density from a detected resonance frequency in the measured spectrum. However, to monitor also the electron temperature an additional resonance parameter, e.g. the half-width of the resonance peak, is necessary. It is strongly influenced by kinetic effects, therefore a study of a kinetic model to obtain a relation between the half-width and the electron temperature is required. In this work such a kinetic model based on functional analytic methods and first spectra are presented.

KW - Engineering

UR - http://meetings.aps.org/Meeting/GEC18/Session/TF3.7

M3 - Conference abstract in journal

VL - 2018

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

SN - 0003-0503

M1 - TF3.00007

T2 - 71st Annual Gaseous Electronics Conference

Y2 - 5 November 2018 through 9 November 2018

ER -