A novel radio-frequency plasma probe for monitoring systems in dielectric deposition processes

Publikation: Beiträge in SammelwerkenAufsätze in KonferenzbändenForschungbegutachtet

Authors

  • C. Schulz
  • T. Styrnoll
  • M. Lapke
  • Jens Oberrath
  • R. Storch
  • P. Awakowicz
  • R. P. Brinkmann
  • T. Musch
  • T. Mussenbrock
  • I. Rolfes
This paper presents a novel industry compatible plasma probe for monitoring systems in dielectric deposition processes. The probe is based on the so called active plasma resonance spectroscopy and allows an extensive evaluation of different important plasma parameters, needed for the supervision and control of the plasma deposition process. Due to its assembly, the probe is insensitive against additional dielectric coating. Hence, the measurement performance is not affected. 3D-electromagnetic field simulations of the probe in a pseudo plasma deposition process, as well as the measurement with a prototype in a real deposition process show a good agreement with the expected behaviour and confirm the applicability of the probe as a monitoring tool for dielectric deposition processes. © 2012 IEEE.
OriginalspracheEnglisch
TitelProceedings of the 2012 International Conference on Electromagnetics in Advanced Applications, ICEAA'12 : ICEAA '12
Anzahl der Seiten4
Band2
VerlagIEEE - Institute of Electrical and Electronics Engineers Inc.
Erscheinungsdatum2012
Seiten728-731
ISBN (Print)978-1-4673-0333-0
ISBN (elektronisch)978-1-4673-0334-7, 978-1-4673-0335-4
DOIs
PublikationsstatusErschienen - 2012
Extern publiziertJa
Veranstaltung14th International Conference on Electromagnetics in Advanced Applications - ICEAA 2012 - Cape Town, Südafrika
Dauer: 02.09.201207.09.2012
Konferenznummer: 14
https://ieeexplore.ieee.org/document/6645154

DOI

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