A novel radio-frequency plasma probe for monitoring systems in dielectric deposition processes

Research output: Contributions to collected editions/worksArticle in conference proceedingsResearchpeer-review

Authors

  • C. Schulz
  • T. Styrnoll
  • M. Lapke
  • Jens Oberrath
  • R. Storch
  • P. Awakowicz
  • R. P. Brinkmann
  • T. Musch
  • T. Mussenbrock
  • I. Rolfes
This paper presents a novel industry compatible plasma probe for monitoring systems in dielectric deposition processes. The probe is based on the so called active plasma resonance spectroscopy and allows an extensive evaluation of different important plasma parameters, needed for the supervision and control of the plasma deposition process. Due to its assembly, the probe is insensitive against additional dielectric coating. Hence, the measurement performance is not affected. 3D-electromagnetic field simulations of the probe in a pseudo plasma deposition process, as well as the measurement with a prototype in a real deposition process show a good agreement with the expected behaviour and confirm the applicability of the probe as a monitoring tool for dielectric deposition processes. © 2012 IEEE.
Original languageEnglish
Title of host publicationProceedings of the 2012 International Conference on Electromagnetics in Advanced Applications, ICEAA'12 : ICEAA '12
Number of pages4
Volume2
PublisherIEEE - Institute of Electrical and Electronics Engineers Inc.
Publication date2012
Pages728-731
ISBN (print)978-1-4673-0333-0
ISBN (electronic)978-1-4673-0334-7, 978-1-4673-0335-4
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event14th International Conference on Electromagnetics in Advanced Applications - ICEAA 2012 - Cape Town, South Africa
Duration: 02.09.201207.09.2012
Conference number: 14
https://ieeexplore.ieee.org/document/6645154

Recently viewed

Researchers

  1. Jochen Schwarz

Publications

  1. Nachhaltigkeitsinformatik
  2. The effects of visual sustainability labels on consumer perception and behavior
  3. Phasing-out Coal in Germany – Not Only, But Also a Legal Challenge
  4. Occurrence of the antidiabetic drug Metformin and its ultimate transformation product Guanylurea in several compartments of the aquatic cycle
  5. The Importance of Being First
  6. Normalitätskonstruktion und Selbstbilder erwachsener Reitender mit einer Körper- oder Sinnesbehinderung
  7. Schätzen – Aber wie?
  8. The universe of group representation in Germany
  9. The need for pluralism in landscape models: a reply to Dunn and Majer
  10. Schreiben
  11. Engaging with entrepreneurial diversity
  12. The ten principles of green sample preparation
  13. Review
  14. The professional identity of gameworkers revisited
  15. Career adaptability development in adolescence
  16. Culturally adapted mathematics education with ActiveMath
  17. SusTimeAbility
  18. Der gefühlte Anspruch in der Haftpflichtversicherung
  19. ADORE - Teaching Adolescent Struggling Readers
  20. Gender Differences in Grip-Strength Depending on Arousal and Valence of Emotions
  21. Abstand nehmen
  22. Safe-and-sustainable-by-design roadmap
  23. The multipole resonance probe: Evolution of a plasma sensor
  24. One-third Codetermination at Company Supervisory Boards and Firm Performance in German Manufacturing Industries
  25. Gemeinsam glücklicher
  26. 2. Methoden-Muster: Gestaltung von Beziehungen, Kontaktpflege, Klima
  27. Schreibfähigkeit
  28. Fallstudie
  29. Workshop on impacts of the EU-UK Trade and Cooperation Agreement on fisheries and aquaculture in the EU
  30. The opportunity development process of nascent entrepreneurs
  31. The relationship between working alliance and client outcomes in coaching
  32. Hydration and Dehydration of CaO/ Ca(OH)2 and CaCl2 / CaCl2 * 6 H2O– TGA/ DSC studies
  33. Autonomie der Migration
  34. On the application of laser shock peening for retardation of surface fatigue cracks in laser beam-welded AA6056
  35. Innovation in a Computable General Equilibrium Model
  36. Zwischen Existenzkampf und Professionalisierung
  37. Wieso gilt Ada Lovelace als die ‚erste Programmiererin‘ und was bedeutet überhaupt ‚programmieren‘?
  38. Distribution and community structure of araneocoenoses (Araneae) along an altitudinal gradient on Kozuf Mountain (North Macedonia)