Planar multipole resonance probe: Comparison of full-wave electromagnetic simulation and electrostatic approximation
Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › begutachtet
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2019 Kleinheubach Conference, KHB 2019. Piscataway: IEEE - Institute of Electrical and Electronics Engineers Inc., 2019. 8890211 (2019 Kleinheubach Conference, KHB 2019).
Publikation: Beiträge in Sammelwerken › Aufsätze in Konferenzbänden › Forschung › begutachtet
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RIS
TY - CHAP
T1 - Planar multipole resonance probe
T2 - Kleinheubach Conference - KHB 2019
AU - Friedrichs, Michael
AU - Pohle, Dennis
AU - Rolfes, Ilona
AU - Oberrath, Jens
PY - 2019/9/1
Y1 - 2019/9/1
N2 - The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.
AB - The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invasive. For the pMRP it was possible to derive an analytic solution of the admittance based on idealizations and an electrostatic approximation. However, electromagnetic simulations of the real pMRP with CST Microwave Studio showed meaningful differences between the obtained resonance frequencies. In this work, it will be shown with simulations in Comsol Multiphysics, that the main difference between the resonances of the ideal and the real pMRP is caused by the thickness of the insulation between the electrodes and the chamber wall.
KW - Active plasma resonance spectroscopy
KW - Multipole resonance probe
KW - Planar multipole resonance probe
KW - Plasma diagnostics
KW - Engineering
UR - http://www.scopus.com/inward/record.url?scp=85075176773&partnerID=8YFLogxK
UR - https://ieeexplore.ieee.org/document/8890211
M3 - Article in conference proceedings
SN - 978-1-7281-3161-0
T3 - 2019 Kleinheubach Conference, KHB 2019
BT - 2019 Kleinheubach Conference, KHB 2019
PB - IEEE - Institute of Electrical and Electronics Engineers Inc.
CY - Piscataway
Y2 - 23 September 2019 through 25 September 2019
ER -