The planar Multipole Resonance Probe: a functional analytic approach

Publikation: Beiträge in ZeitschriftenZeitschriftenaufsätzeForschungbegutachtet

Authors

Active Plasma Resonance Spectroscopy (APRS) is a well known diagnostic method, where a radio frequency probe is immersed into a plasma and excites plasma oscillations. The response of the plasma is recorded as frequency dependent spectrum, in which resonance peaks occur. By means of a mathematical model plasma parameters like the electron density or the electron temperature can be determined from the detected resonances.

The majority of all APRS probes have in common, that they are immersed into the plasma and perturb the plasma due to the physical presence of the probe. Thus, they are invasive and can at least influence the homogeneity of the plasma. To overcome this problem, the planar Multipole Resonance Probe (pMRP) was invented, which can be integrated into the chamber wall of a plasma reactor.

Within this paper, the first analytic model of the pMRP is presented, which is based on a cold plasma description of the electrons. The general admittance of the probe-plasma system is derived by means of functional analytic methods and a complete orthonormal set of basis functions. Explicit spectra for an approximated admittance including a convergence study are shown. The determined resonance frequencies are in good agreement with former simulation results.
OriginalspracheEnglisch
Aufsatznummer7
ZeitschriftEPJ Techniques and Instrumentation
Jahrgang5
Ausgabenummer1
Anzahl der Seiten15
ISSN2195-7045
DOIs
PublikationsstatusErschienen - 09.08.2018

Bibliographische Notiz

The authors acknowledge support by the internal funding of the Leuphana University Lüneburg and the German Research Foundation via the project OB 469/1-1. Gratitude is expressed to J. Gong, D.-B. Grys, M. Lapke, M. Oberberg, D. Pohle, C. Schulz, J. Runkel, R. Storch, T. Styrnoll, S. Wilczek, T. Mussenbrock, P. Awakowicz, T. Musch, and I. Rolfes, who are or were part of the MRP-Team at Ruhr University Bochum. Explicit gratitude is expressed to R.P. Brinkmann for fruitful discussions.

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