Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach

Publikation: Beiträge in ZeitschriftenKonferenz-Abstracts in FachzeitschriftenForschungbegutachtet


Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose the multipole resonance probe (MRP) represents a satisfying solution to measure the electron density. However the influence of the probe on the plasma through its physical presence makes it unattractive for some processes in industrial application.
A solution to combine the benefits of the spherical MRP with the ability to integrate the probe into the plasma reactor is introduced by the planar model of the MRP (pMRP).
Introducing the spectral kinetic formalism leads to a reduced simulation-circle compared to particle-in-cell simulations. The model of the pMRP is implemented and first simulation results are presented.
ZeitschriftBulletin of the American Physical Society
Seiten (von - bis)42
Anzahl der Seiten1
PublikationsstatusErschienen - 11.10.2016

Bibliographische Notiz

69th Annual Gaseous Electronics Conference, October 10–14, 2016; Bochum, Germany.
Abstract: HT6.00041

Zugehörige Projekte

  • Nachweis eines kinetischen Einflusses auf die Resonanzverbreiterung im Spektrum eines Sensors zur aktiven Plasmaresonanzspektroskopie

    Projekt: Forschung

  • Kinetische Modellierung und Simulation der planaren Multipolresonanzsonde

    Projekt: Forschung