In this paper a model of a hybrid actuator is proposed. It consists of a piezo-mechanical structure (including a hydraulic transmission ratio) and a hydraulic aggregate. Moreover, a cascade control strategy based on Model Predictive Control (MPC) is proposed to track periodic valve trajectory signals. The proposed cascade control structure consists of an internal and an external controller. The secondary, internal controller is needed to accomplish a Soft Landing. The MPCs are combined with two feed forward control actions, one for each part of the model. Simulation results carried out the suitability of the control approach.