The multipole resonance probe: Characterization of a prototype

Publikation: Beiträge in ZeitschriftenKommentare / Debatten / BerichteForschung

Authors

  • Martin Lapke
  • Jens Oberrath
  • Christian Schulz
  • Robert Storch
  • Tim Styrnoll
  • Christian Zietz
  • Peter Awakowicz
  • Ralf Peter Brinkmann
  • Thomas Musch
  • Thomas Mussenbrock
  • Ilona Rolfes
The multipole resonance probe (MRP) was recently proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2008 Appl. Phys. Lett. 93 051502). This communication reports the experimental characterization of a first MRP prototype in an inductively coupled argon/nitrogen plasma at 10 Pa. The behavior of the device follows the predictions of both an analytical model and a numerical simulation. The obtained electron densities are in excellent agreement with the results of Langmuir probe measurements. © 2011 IOP Publishing Ltd.
OriginalspracheEnglisch
Aufsatznummer042001
ZeitschriftPlasma Sources Science and Technology
Jahrgang20
Ausgabenummer4
Anzahl der Seiten4
ISSN0963-0252
DOIs
PublikationsstatusErschienen - 08.2011
Extern publiziertJa

DOI

Zuletzt angesehen

Forschende

  1. Heidrun Bräuer

Publikationen

  1. Effects of prescribed burning on plant available nutrients in dry heathland ecosystems
  2. First record of Batrachochytrium dendrobatidis on amphibians in Romania
  3. 'The Returned': on the future of monographic books
  4. Key Competencies for and beyond Sustainable Consumption
  5. Modification of the umu-assay (ISO 13829) accounting for cytotoxicity in genotoxicity assessment: A preliminary study
  6. Das Recht der Kinder auf Partizipation
  7. Die Familienstiftung
  8. Microstructural investigations of the Mg-Sn-xCa system
  9. Corruption in Europe
  10. Hot workability characteristics of cast and homogenized Mg-3Sn-1Ca alloy
  11. Interhandel case
  12. Comparing EU and US Democracy Promotion in the Meditirranean and the Newly Independent States
  13. Empirical research on the European Nonfinancial Reporting Directive 2014/95 (NFRD) – a structured literature review
  14. Enzyklopädien und Pluralisierungsprozesse um 1600
  15. Hospital Effluents as a Source for Platinum in the Environment
  16. Emissions of decamethylcyclopentasiloxane from Chicago
  17. Is There a World Courthouse on Foley Square? On Civil Procedure, Private International Law and Human Rights in the Age of Globalisation
  18. Foundations of Management & Entrepreneurship
  19. Bloggen für eine Nachhaltige Entwicklung?!
  20. Lehrergesundheit
  21. Multidisciplinary characterization of the middle Holocene eolian deposits of the Elsa River basin (central Italy)
  22. Rapid ant community reassembly in a Neotropical forest
  23. Antecedents of Business Opportunity Identification and Innovation
  24. Sustainability Management and Small and Medium-Sized Enterprises
  25. Lekcja 23-24
  26. Air concentrations and particlegas partitioning of polyfluoroalkyl compounds at a wastewater treatment plant
  27. Charting the Emerging Financial Services Ecosystem of Fintechs and Banks
  28. Die Hochschulen stellen sich vor:
  29. Biomas Nutrient Recycling
  30. La qualification des infractions fiscales en Allemagne
  31. § 351 Unteilbarkeit des Rücktrittsrechts