Spiller, E., Schöll, A., Alexy, R.,
Kümmerer, K. & Urban, G. A.,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. : Digest of Technical Papers. TRANSDUCERS '05, Seoul, Korea, June 5-9, 2005. IEEE - Institute of Electrical and Electronics Engineers Inc.,
Vol. 2.
p. 1756-1759 4 p. (International Conference on Solid State Sensors and Actuators (TRANSDUCERS) ).
Research output: Contributions to collected editions/works › Article in conference proceedings › Research › peer-review