Proof of a kinetic influence on the resonance broadening in the spectrum of an active plasma resonance spectroscopic probe
Project: Research
Project participants
- Oberrath, Jens (Project manager, academic)
Status | Finished |
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Period | 01.10.15 → 14.01.17 |
Research outputs
Influence of kinetic effects on the spectrum of a parallel electrode probe
Research output: Journal contributions › Journal articles › Research › peer-review
Block matrix based LU decomposition to analyze kinetic damping in active plasma resonance spectroscopy
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Kinetic modeling of active plasma resonance spectroscopy
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Planar Multipol-Resonance-Probe: A Spectral Kinetic Approach
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Active Plasma Resonance Spectroscopy: Evaluation of a fluiddynamic-model of the planar multipole resonance probe using functional analytic methods
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Kinetic Damping in the Spectrum of the Spherical Impedance Probe
Research output: Journal contributions › Conference abstract in journal › Research › peer-review
Die sphärische Impedanzsonde: Ein Plasmasensor in metallisch abscheidenden Plasmaprozessen
Research output: Contributions to collected editions/works › Published abstract in conference proceedings › Research › peer-review