Planar Multipole Resonance Probe: Comparison of a Functional Analytic Approach and Full 3D Electromagnetic Field Simulations

Activity: Talk or presentationPresentations (poster etc.)Research

Michael Friedrichs - Speaker

Christian Schulz - Coauthor

Ilona Rolfes - Coauthor

Ralf Peter Brinkmann - Coauthor

Jens Martin Oberrath - Coauthor

    Measuring plasma parameters, e.g. electron density and electron temperature, is an important procedure to verify the stability and behavior of a plasma process. For this purpose, the multipole resonance probe (MRP) represents a promising design. However, the influence of the probe on the plasma through its physical presence makes it unattractive for most processes in industrial applications. A solution, suitable for industrial applications, is the planar version of the MRP (pMRP). It combines the design and benefits of the spherical MRP and can be mounted into the chamber wall. To analyze the resonance behavior of the pMRP the cold plasma model is coupled to the Poisson equation and an analytical expression for the admittance of the probe-plasma system can be derived by means of functional analytic methods. It is adjusted to the design of the pMRP in cylindrical geometry and the corresponding spectra are compared to full 3D electromagnetic field simulations. Based on the Finite Integration Technique, the commercial software CST Microwave Studio is utilized for these simulations. The resulting complex reflection coefficient is evaluated, obtained by the frequency domain solver in conjunction with a tetrahedral mesh and the Drude model.
    13.03.2017

    Event

    DPG Frühjahrstagung 2017

    13.03.1717.03.17

    Bremen, Germany

    Event: Conference

    Recently viewed

    Activities

    1. Activist Sense and Affective Relaying in Alternative Media Practices
    2. International Flusser Lectures Day - 2010
    3. Praxis Englisch (Fachzeitschrift)
    4. Project Workshop on "Worker Flows, Match Quality, and Productivity" - 2019
    5. Validation of School Inspection Frameworks and Methods
    6. Traces of varying task formulations within the texts of students
    7. Organizing temporary co-presence to induce and cope with uncertainty in creative processes
    8. 28th American Conference on Information Systems 2022 - AMCIS 2022
    9. Engaging with the other ... or not. The representation of foreign nations in ABCs and picturebooks.
    10. Journal of Applied Ecology (Fachzeitschrift)
    11. Advances in large scale production of mircoalgae and mussels (Mytilus edulis)
    12. BioDiva Start-up Workshop 2010
    13. The XEROCHORE Conference on Drought Science and Policies - 2010
    14. Digital Capitalism meets Leberkaspeppi: Temporal Orientations in Business Models as a Source of Platform Power in Mature Industries
    15. Digital capitalism meets “Leberkaspepi”: Temporal orientations in business models as a source of platform power in mature industries
    16. International Relations (Fachzeitschrift)
    17. Pitfalls and potential of institutional change: Rain-index insurance and the sustainability of rangeland management
    18. University of North Carolina at Chapel Hill
    19. Vortrag: Nachhaltigkeitsbewusstsein unternehmensintern steigern
    20. Life Cycle Assessment and Cost Accounting on Corporations for Eco-Efficient Production Systems
    21. Biophysical variability and politico-economic singularity: Responses of livestock numbers in South Mongolian nomadic herding
    22. University of Copenhagen